Flexible/Bendable Acoustofluidics Based on Thin-Film Surface Acoustic Waves on Thin Aluminum Sheets

In this paper, we explore the acoustofluidic performance of zinc oxide (ZnO) thin-film surface acoustic wave (SAW) devices fabricated on flexible and bendable thin aluminum (Al) foils/sheets with thicknesses from 50 to 1500 ?m. Directional transport fluids along these flexible/bendable surfaces offers potential applications for next generation microfluidic systems, wearable biosensors soft robotic control. Theoretical calculations indicate that bending under strain levels up 3000 ?? causes a small frequency shift amplitude change (<0.3%) without degrading performance. Through systematic investigation effects Al sheet thickness actuation bent devices, identify optimum range both maintain efficient enable significant deformation substrate, providing guide design such devices. Finally, demonstrate liquid transportation across wide substrate geometries including inclined, curved, vertical, inverted, lateral positioned using 200 ?m thick SAW device.